A SHADOW MASK-EVAPORATED TOPSIDE PYROMEMS IGNITER

Danick Briand, David de Koninck, Nico de Rooij
2010
Article de conférence

A shadow mask-evaporated pyroMEMS igniter is presented. The metallization was successfully carried out without ignition or any visible degradation of the propellant charge during evaporation. Directly depositing the Joule-heating igniter onto the propellant charge led to a high level of ignition delay time homogeneity (< 1 ms st. dev.) as well as smooth combustion behavior. Effect of different deposition thicknesses (500 nm vs. 2000 nm), deposition methods (e-beam vs. thermal) and substrate holders (rotary-planetary vs. line-of-sight) on ignition behavior were investigated. Two different ignition regimes were observed depending on input power and igniter thickness: Joule-heating and spark-induced ignition. Highest fabrication repeatability (in terms of electrical resistance) and ignition reliability (in terms of ignition delay time) were obtained with the 2000 nm thick igniters.

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Danick Briand, David de Koninck, Nico de Rooij
2010
Article de conférence

Résumé

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https://infoscience.epfl.ch/record/162501?ln=fr

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A shadow-mask evaporated pyroMEMS igniter

Danick Briand, David de Koninck, Nico de Rooij

A reliable pyroMEMS igniter was successfully demonstrated based on shadow-mask evaporation of metal directly onto solid propellant drops. In this way, intimate contact between the fuel and the igniter was guaranteed. No visible degradation of the fuel was observed after the evaporation. A preliminary process-parameter study was carried out. Two different ignition regimes were observed depending on the input power and igniter thickness: Joule heating and spark-induced ignition. Steady combustion in air was obtained and ignition delay time variability of less than 1 ms (std. dev.) was achieved. The igniter described herein potentially enables the wafer-level fabrication of pyroMEMS devices without any manual post-processing, thus increasing fabrication yield and device reliability.

2011

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