High Bandwidth CMOS Magnetic Sensors Based on the Miniaturized Circular Vertical Hall Device
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An electronic compass made of a new planar 2D micro-fluxgate sensor is presented. The magnetometer is integrated in a standard CMOS process, and uses a post-processed cross-shaped ferromagnetic amorphous core. This core is diagonally placed above a single ...
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NOVELTY - A micro-electro-mechanical-system (MEMS) is manufactured by the use of a sacrificial layer that is made of silicon. USE - The invention is used in surface micromachining for the manufacture of a MEMS containing a suspended metal layer or MEMS dev ...