Accurate nonlinear phase step estimation in phase shifting interferometry
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The effectiveness of phase-shifting interferometry (PSI) techniques employing piezoelectric device PZT in the estimation of phase depends largely on the accuracy with which the phase shifts are imparted to the device and the noise influencing the measureme ...
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Phase of the interference fringe pattern is known to convey important information in optical metrology. Typically, phase measurement using temporal techniques involves incorporating a piezoelectric device (PZT) in one arm of the interferometer for shifting ...
