Publication
Fabrication of sub-10 nm gap arrays over large areas for plasmonic sensors
Publications associées (45)
Scalable fabrication of functional nanostructures on stretchable substrates by capillary-assisted particle assembly and adhesion lithography
The fabrication of metallic nanostructures on stretchable substrates enables specific applications that exploit the combination of the nano-scale phenomena and the mechanical tunability of the physical dimensions of the nanostructures. Due to the large dif ...
EPFL2022Spontaneous formation of ordered micro-wrinkles on a thermosensitive resist
Jürgen Brugger, Giovanni Boero, Xia Liu, Ana Conde Rubio, Mohammadreza Rostami
Self-organizing patterns with micrometer-scale features are promising for applications in photonics and bioengineering. Their spontaneous formation reduces the number of required processing steps. Here, we report an approach to spontaneously form stochasti ...
2021Mesoscopic magnetic systems: From fundamental properties to devices
Research into mesoscopic magnetic systems, which incorporate magnetic elements with dimensions ranging from a few nm up to a few 10s of micrometer, has been spurred on by the developments in their fabrication, characterisation, and control. Electron beam a ...
2021Study of Linear Coupling in NEMS
Cantilever beams are used as mass sensing device of chemical analyte by measuring the shift in frequency. However there resolution is linked to their size. As it become increasingly hard to produce smaller device an alternative is to use mode localisation ...
2021Fabrication of piezoelectric electrodes
The objective of this semester project is to investigate different fabrication processes and materials used for the fabrication of piezoelectric electrodes. More in detail, to investigate if the use of test wafers and high resistivity wafers play a role on ...
2021Thermomechanical Nanocutting of 2D Materials
Jürgen Brugger, Giovanni Boero, Xia Liu, Ana Conde Rubio, Samuel Tobias Howell
Atomically thin materials, such as graphene and transition metal dichalcogenides, are promising candidates for future applications in micro/nanodevices and systems. For most applications, functional nanostructures have to be patterned by lithography. Devel ...
2020Printing sub-micron structures using Talbot mask-aligner lithography with a 193 nm CW laser light source
Toralf Scharf, Wilfried Noell, Raoul Kirner, Andreas Vetter
A continuous improvement of resolution in mask-aligner lithography is sought after to meet the requirements of an ever decreasing minimum feature size in back-end processes. For periodic structures, utilizing the Talbot effect for lithography has emerged a ...
2018Multimaterial Nanoporous Membranes Shaped through High Aspect-Ratio Sacrificial Silicon Nanostructures
Philippe Renaud, Arnaud Bertsch, Niccolo Piacentini, Stefano Silvio Giovanni Varricchio
We present an innovative fabrication method for solid-state nanoporous membranes based on the casting of sacrificial silicon nanostructures. The process allows the individual definition of geometry and placement of each nanopore through e-beam lithography ...
Amer Chemical Soc2017