Application of titanium containing amorphous hydrogenated carbon films (a-C:H/Ti) as optical selective solar absorber coatings
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This paper reports the impressive mechanical properties of 1 μm thick carbon-containing SiOx gas barrier coatings, characterised using the uniaxial fragmentation test. Such coatings have been found to act as excellent barriers to water vapour permeation pa ...
We present a MEMS process for the fabrication of arbitrary (adaptable to specific aperture geometries) stabilization of silicon nitride membranes to be used as miniature shadow masks or (nano) stencils. Stabilization was realized by the fabrication of sili ...
In this paper, the authors present a breakthrough extension of the stencil lithography tool and method. In the standard stencil lithography static mode, material is deposited through apertures in a membrane (stencil) on a substrate which is clamped to the ...
Multilayered niobium oxynitride films were deposited onto (100) Si using DC magnetron sputtering with a reactive gas pulsing process. The argon and nitrogen flows were kept constant during sputtering of a pure niobium target and the oxygen flow was pulsed ...
Transition metal dichalcogenides (TMD) are widely used as self-lubricating material either as oil additive or directly as thin films. Magnetron sputtering is a deposition method allowing depositing such films with high density and adhesion. However, their ...
Zinc oxide (ZnO) is now often used as a transparent conductive oxide for contacts in thin-film silicon solar cells. This paper presents a study of ZnO material deposited by the low-pressure chemical vapour deposition technique, in a pressure range below th ...
Medical grade poly(vinyl chloride) was modified by RF plasma-deposition of teflon-like coatings to create a platform for the physisorption of PEO-containing copolymers, Pluronics (R). Thin teflon-like coatings were deposited in an RF-plasma reactor by plas ...
Nanocomposite thin films exhibit interesting optical properties which differ from those of the pure constituents. Effective medium theories are used to model the dielectric function of the nanocomposite materials. We give an introduction to the theories of ...
Ag cubes of uniform size (70nm) and self-assembled into two dimensional arrays are formed by physical vapor deposition. The formation of the Ag cubes depends critically on the substrate composition. While heat dissipation can control the crystallization of ...
Nano Science and Technology Institute, Cambridge, MA 02139, United States2006
Cohesive and adhesive properties of silicon oxide barrier coatings deposited from an oxygen/hexamethyldisiloxane gas mixture by plasma enhanced chemical vapor deposition, with controlled incorporation of carbon on 12 mm thick polyethylene terephtalate film ...