Large MEMS-based programmable reflective slit mask for multi-object spectroscopy fabricated using multiple wafer-level bonding
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everal SrTiO3 (STO) thin films without electrodes processed by pulsed laser deposition, of thicknesses down to 40 nm, were studied using infrared transmission and reflection spectroscopy. The complex dielectric responses of polar phonon modes, particularly ...
We are developing micromirror arrays (MMA) for future generation infrared multiobject spectroscopy (MOS) requiring cryogenic environment. So far we successfully realized small arrays of 5 x 5 single-crystalline silicon micromirrors. The 100 mu m x 200 mu m ...
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This paper presents continuative results on the design, fabrication and measurements of a vertically moving, electrostatically actuated micromirror, first shown at the IEEE MEMS 2007 [N. Quack, I. Züst, S. Blunier, J. Dual, M. Arnold, F. Felder, M. Rahim, ...
Highly sensitive photodetectors for the mid-infrared have recently been obtained by placing a photodiode inside a Fabry-Pérot cavity (Arnold et al 2005 Appl. Phys. Lett. 87 141103). These resonant cavity enhanced detectors (RCED) are sensitive at the res ...
We calculate the transverse and the longitudinal infrared absorption spectra of the hydrated silicon surface using a first-principles approach. The absorption spectra are computed for two different configurations of water molecules dissociatively chemisorb ...
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