Low-loss germanium strip waveguides on silicon for the mid-infrared

Mid-infrared photonics in silicon needs low-loss integrated waveguides. While monocrystalline germanium waveguides on silicon have been proposed, experimental realization has not been reported. Here we demonstrate a germanium strip waveguide on a silicon substrate. It is designed for single mode transmission of light in transverse magnetic (TM) polarization generated from quantum cascade lasers at a wavelength of 5.8 μm. The propagation losses were measured with the Fabry–Perot resonance method. The lowest achieved propagation loss is 2.5 dB=cm, while the bending loss is measured to be 0.12 dB for a 90° bend with a radius of 115 μm.

Design, Fabrication and Characterization of Mid-Infrared Strip Waveguide for Laser Spectroscopy in Liquid Environments

Yu-Chi Chang

Optical sensors based on the interaction between molecular vibrations and mid infrared radiations attracted high attentions in the last decades. In this study, we present the development of a waveguide evanescent field sensor based on the absorption spectroscopy in liquid environments. The device consists of a single mode strip waveguide integrated with a microfluidic system. With a quantum cascade laser at the wavelength of 5.8 μm, we demonstrate the detection of cocaine dissolved in tetrachloroethylene (PCE). Mid infrared germanium waveguides on silicon have been proposed but not experimentally demonstrated. Here we realize this new type of waveguide with a monocrystalline germanium layer on a silicon substrate (Ge-on-Si) with standard photolithography and reactive ion etching. It is designed to be singlemode in transverse magnetic polarization at 5.8 μm. We used a method based on the Fabry-Perot resonance to measure the propagation loss, and the achieved lowest loss is 2.4 dB/cm. The bending loss was measured to be 0.12 dB per 90∘bend with the radius of 115 μm. A microfluidic chip made from a UV-curable adhesive is integrated to the Ge-on- Si waveguide. This is the first integration of this waveguide with a microfluidic system. Solutions of cocaine in PCE flow in the microfluidic channel and absorb the light in the evanescent field. A reference waveguide and an integrated Y- junction eliminate the noise from coupling fluctuations, and the limit of detection is calculated to be 5 μg/ml. Mid infrared photonics can be further developed based on the platform of Ge-on- Si waveguides. We demonstrate a detection of refractive index changes with a Mach-Zehnder interferometer integrated with a microfluidic system. Subwavelength structures for antireflection of the waveguide facets are also experimentally tested. We foresee an increasing development and applications based on this waveguide in the mid infrared.

EPFL2012

High numerical aperture silicon collimating lens for mid-infrared quantum cascade lasers manufactured using wafer-level techniques

Pierre-Yves Baroni, Joab Di Francesco, Hans Peter Herzig, Lubos Hvozdara, Antoine Muller

We present an aspheric collimating lens for mid-infrared (4-14 µ) quantum cascade lasers. The lenses were etched into silicon by an inductively coupled plasma reactive ion etching system on wafer level. The high refractive index of silicon reduces the height of the lens prole resulting in a simple element working at high numerical aperture (up to 0.82). Wafer level processes enable the fabrication of about 5000 lenses in parallel. Such cost-eective collimating lens is a step towards the adoption of quantum cascade lasers for all its potential applications.

2012

Extreme polarization-dependent supercontinuum generation in an uncladded silicon nitride waveguide

Caroline Gaëlle Amiot, Camille Sophie Brès, Eirini Tagkoudi

We experimentally demonstrate the generation of a short-wave infrared supercontinuum in an uncladded silicon nitride (Si3N4) waveguide with extreme polarization sensitivity at the pumping wavelength of 2.1 µm. The air-clad waveguide is specifically designed to yield anomalous dispersion regime for transverse electric (TE) mode excitation and all-normal-dispersion (ANDi) at near-infrared wavelengths for the transverse magnetic (TM) mode. Dispersion engineering of the polarization modes allows for switching via simple adjustment of the input polarization state from an octave-spanning soliton fission-driven supercontinuum with fine spectral structure to a flat and smooth ANDi supercontinuum dominated by a self-phase modulation mechanism (SPM). Such a polarization sensitive supercontinuum source offers versatile applications such as broadband on-chip sensing to pulse compression and few-cycle pulse generation. Our experimental results are in very good agreement with numerical simulations.

2021

Design, Fabrication and Characterization of Mid-Infrared Strip Waveguide for Laser Spectroscopy in Liquid Environments

Yu-Chi Chang

EPFL2012