Polymer-based flexible capacitive sensor for three-axial force measurements
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This paper presents a pressure sensor based on a variable capacitor formed by a movable polysilicon sealed membrane sensitive to pressure. When operated as a pressure sensor two operation regions are observed, an exponentially sensitivity region at low pre ...
Stress-induced changes in the imprint and switching behavior of (111)-oriented Pb(Zr,Ti)O-3 (PZT)-based capacitors have been studied using piezoresponse force microscopy. Visualization of polarization distribution and d(33)-loop measurements in individual ...
We studied polarization switching of 295 nm thick -oriented-Pb(Zr0.45Ti0.55)O-3 (PZT) thin-film capacitors through a polarization hysteresis loop and piezoelectric force microscopy (PFM) on top of the Pt electrode. Positive voltage pulses of 450 kV/cm ...
The occurrence of switching-induced suppression of the remanent polarization (fatigue) in Pb(Zr,Ti)O-3 (PZT) ferroelectric capacitors with comb shaped top electrodes was studied by means of scanning force microscopy assisted by a lock-in amplifier. Fatigue ...
Dielectric breakdown of (Pb,La)(Zr,Ti)O-3(PLZT) film capacitors with Pt and SrRuO3 electrodes, in its initial or virgin state and after voltage cycling that causes polarization fatigue, is studied by constant-current measurements. It is shown that for diff ...
Capacitors in metal-insulator-metal structure have been fabricated with different bottom electrodes. It has been found that the observed losses are enormous at gigahertz frequencies unless due care is taken not only for the conductivity of the bottom elect ...
Direct observation of polarization distribution at nanoscale by scanning force microscopy across partially etched Pb(Zr,Ti)O-3 film ferroelectric capacitors with size 2x3 mum and preferential orientation (111) has revealed an anomalous polarization pattern ...