Integrated long-range thermal bimorph actuators for parallelizable bio-AFM applications
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Metal ion implantation is shown here as an effective technique to fabricate highly compliant electrodes at room temperature on polymer substrates. By implanting 5 keV gold ions in polydimethylsiloxane we have fabricated micron-scale electrodes that conduct ...
Elsevier Science, Reg Sales Off, Customer Support Dept, 655 Ave Of The Americas, New York, Ny 10010 Usa2009
Multi-object spectroscopy is a powerful tool for space and ground-based telescopes for the study of the formation of galaxies. This technique requires a programmable slit mask for astronomical object selection. We are developing MEMS-based programmable ref ...
Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2011
Increasing the efficiency of crystalline silicon (c-Si) solar cells requires the reduction of both bulk and interface recombination. Even if bulk recombination is almost suppressed, the symmetry of the crystal lattice is disturbed at the surface and hence, ...
We discuss different composite plasmonic nanostructures, which optical properties can be tuned by displacing some of their parts at the nanoscale. The actuation of these structures with MEMs will define new optical functionalities. ...
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa2008
In this study, we present the results and implications of an experimental study into the effect of gold-ion implantation on the actuation performance of ionic-type conducting polymer actuators, represented here by cantilevered tri-layer polypyrrole (PPy) a ...
In this communication, we report on the integration of metal-oxide gas sensors on polymeric micro-hotplates made on polyimide and silicon substrates. Low-power consumption micro-hotplates with platinum electrodes and heaters were fabricated on polyimide me ...
In this paper, we present a detailed investigation into the suitability of atomic force microscopy (AFM) cantilevers with integrated deflection sensor and micro-actuator for imaging of soft biological samples in fluid. The Si cantilevers are actuated using ...
In the context of the diminishing fossil energy resources and global warming, much research is focused on sustainable energy sources. The research that is presented in this thesis falls in this category as it contributes to the development of a device that ...
Laser annealing of shape memory alloy thin films provides new opportunities in actuator design and fabrication for microelectromechanical systems applications. In this paper, we present a three-dimensional thermal model to simulate the crystallization proc ...
Nowadays many consumer electronic devices are using small engines (micromotors). Thanks to technological innovation, the components can be imbedded into numerous portable systems. The key factors for a nomadic integration are: reduction of power consumptio ...