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Fabrication of AFM Probes: Tip, Cantilever and Chip micromachining by DRIE

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Fabrication of AFM Probes: Tip, Cantilever and Chip micromachining by DRIE

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Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors

Robust PECVD SiC membrane made for stencil lithography

High aspect ratio sub-micron trenches on silicon-on-insulator and bulk silicon

Micro-beams with tunable stiffness and curvature for mechano-sensitive cell culture substrates

Sharp High-Aspect-Ratio AFM Tips Fabricated by a Combination of Deep Reactive Ion Etching and Focused Ion Beam Techniques

Physicochemical and Electrochemical Properties of Etched GaP(111)A and GaP(111)B Surfaces

Method for fabricating micromirror for barcode reader, involves forming holes having diameter less than width of arms on both side of micromirror and wafer and on edges of region separating wafer and micromirror by etching arms

High reflectivity airgap distributed Bragg reflectors realized by wet etching of AlInN sacrificial layers

Stress and aging minimization in photoplastic AFM probes

Stress and aging minimization in photoplastic AFM probes

Robust PECVD SiC membrane made for stencil lithography

High aspect ratio sub-micron trenches on silicon-on-insulator and bulk silicon

Micro-beams with tunable stiffness and curvature for mechano-sensitive cell culture substrates

Sharp High-Aspect-Ratio AFM Tips Fabricated by a Combination of Deep Reactive Ion Etching and Focused Ion Beam Techniques

Physicochemical and Electrochemical Properties of Etched GaP(111)A and GaP(111)B Surfaces

Method for fabricating micromirror for barcode reader, involves forming holes having diameter less than width of arms on both side of micromirror and wafer and on edges of region separating wafer and micromirror by etching arms

High reflectivity airgap distributed Bragg reflectors realized by wet etching of AlInN sacrificial layers

Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors

Stress and aging minimization in photoplastic AFM probes

Stress and aging minimization in photoplastic AFM probes