On-chip NIR optical spectrometer based on polymeric waveguide and metallic nano-structures
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The main topic of this thesis is the fabrication and characterization of structures smaller than the wavelength of light, for operation in the visible or near infrared spectral range. In the first part of this thesis, the fabrication of periodic structures ...
In-plane linear displacements of microelectromechanical systems are measured with subnanometer accuracy by observing periodic micropatterns with a CCD camera attached to an optical microscope. The translation of the microstructure is retrieved from the vid ...
Institute of Electrical and Electronics Engineers2010
Mechanical resonators are attractive for many applications in signal processing and sensing applications [1]. However, the aggressive scaling of their dimensions into the nanometer range with a simultaneous increase of the resonance frequency makes their d ...
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Institute of Electrical and Electronics Engineers2010
The fabrication of a slot waveguide cavity oriented to sensing application is demonstrated. The choice of materials and the development of the process flow steps, including E-beam lithography (EBL) and metal lift-off of a single thin layer, are illustrated ...