Inhomogeneous nucleation and growth of palladium and alloyed cobalt during self-aligned capping of advanced copper interconnects
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Modern communication devices demand challenging specifications in terms of miniaturization, performance, power consumption and cost. Every new generation of radio frequency integrated circuits (RF-ICs) offer better functionality at reduced size, power cons ...
The understanding of material self-assembling and self-organization mechanisms, at mesoscale, is crucial for nanotechnologies development. Such structures, hierarchically organized in superlattices or colloïdal crystals, are observed in inorganic or organo ...
Nanometer-thick platinum silicide films were obtained by solid-state thermal reaction films in the presence of an interfacial native silicon oxide layer. They were studied using High-Resolution Transmission Electron Microscopy (HRTEM) and selected-area ele ...
A generic method for the packaging of transducers at the foil level is proposed and was demonstrated on chemical gas sensors made on a plastic foil. The processing was based on the lamination of pre-patterned polymeric structures on the fabricated devices ...
We review laser applications in thin-film photovoltaics (thin-film Si, CdTe, and Cu(In,Ga)Se2 solar cells). Lasers are applied in this growing field to manufacture modules, to monitor Si deposition processes, and to characterize opto-electrical properties ...
This paper reports on the microfabrication and characterization of piezoelectric MEMS structures based on epitaxial Pb(Zr0.2Ti0.8)O-3 (PZT) thin films grown on silicon wafers. Membranes and cantilevers are realized using a sequence of microfabrication proc ...
Submonolayer epitaxial growth is obtained by the deposition of less than a complete layer of atoms on a single crystal surface. It is of fundamental interest for industrial applications (e.g. in the semiconductor industry) as well as from the point of view ...
The influence of the coordination on the Kondo temperature of a magnetic impurity at a noble metal surface and the line shape observed in low temperature scanning tunneling spectroscopy (STS) is investigated for single cobalt atoms adsorbed on and embedded ...
Cantilever-based detection of ultrasmall forces is of great interest for several applications such as magnetic resonance force miscroscopy (MRFM) where an ultrahigh sensitive cantilever is used to detect magnetic resonance in small ensembles of electron or ...
The aim of this thesis was to synthesise and control a nanostructured composite of copper/cobalt. Both the copper and cobalt oxalate exhibit a nanostructure. Attempts to produce nanocomposite particles in the size range of 10-70 nm were made via an oxalate ...