Miniature silicon Michelson interferometer characterization for dimensional metrology

Dimensional metrology applications require performing measurements of profile and form/shape of parts at a nanometer-level of accuracy. Therefore, the metrological characteristics of a miniature optical micro-probe based on a Michelson interferometer are evaluated. The optical micro-probe is designed to perform dimensional measurements with a target uncertainty in the order of few nanometers. Two microprobe designs having reflection-transmission ratios of 75-25% and 25-75%, are characterized. Two optical setups have been implemented as well: firstly, using a single laser diode with a 1550.3 nm wavelength and secondly using a tunable laser source in the C-L bands. The characterization of the two micro-probes is performed using a new ultra-precise test bench, with respect to both dissociated metrology structure and Abbe principles. The experiments allow the evaluation of the error sources such as: stability, axial motion errors (residual errors), material dependence, tilt angle and roughness of the tested object. The experimental results revealed that dimensional measurements could be achieved with nanometer-scale errors, ranging from 2 nm to 15 nm, depending on the probe design and the reflectance of the device under test. (C) 2015 Elsevier B.V. All rights reserved.

Endoscopic low coherence interferometry applied to tri-dimensional contouring of upper airways

Yves Delacrétaz

This thesis presents a novel approach for optical tri-dimensional contouring, requiring only one acquisition to extract a contour depth. It is based on an interferometric setup, using a reduced coherence light source, and is fully adaptable to endoscopic procedure commonly in used in ear-nose-throat (ENT) medicine. It has been demonstrated that the method can be successfully applied to imaging of porcine upper airways. Although this method uses interferometry to obtain depth range measurement, the phase signal is not directly evaluated, rather the location of the coherent superposition of two waves is extracted, and thus provides a robust technique even in harsh environment. The key feature is to extract the coherent area on the image by locating intentionally induced fringes created by off-axis superposition of a smooth reference wave and an object wave coming from a rough or diffusing sample through an optical system with limited aperture. A model for the propagation of the light through the optical system has been developed. It takes into account the broadened emission spectrum of the light source, as well as the statistical speckle effect induced by the illumination of a rough surface with partially coherent light. Simulated results have been carefully compared with measurements, both in the spatial domain and in the Fourier domain (spatial frequencies response), which has permitted to better understand the processes involved in the creation of the interference fringes, and improve the design of the device. Different filters have been investigated in order to extract the depth information from acquired interferograms. By using Gabor filterbanks, which do not need any a priori knowledge of the signal, selectivity of the extracted signal has been enhanced by a factor of 1.3 compared to a simple local Fourier spectrum evaluation, and time of the extraction procedure divided by 6, even when compared to fast iterative calculation in the Fourier spectrum. Moreover, by imposing the frequency and/or orientation of the signal to detect, which can be known by a simple calibration procedure, it has been proved that the selectivity can be further enhanced by a factor of 2.5, keeping the calculation time as short or even shorter. A compact prototype has been designed and built, with a specific multiple fibers arrangement for illumination. The system is separated in two parts: the first one is directly attached to the rigid endoscope, and contains imaging as well as recombining object/reference wave optics, and the detector. It fits into a box with overall dimensions of 115 × 83 × 94 mm. The second part contains the laser source, the scanning arm and the injection optics for the fibered system. It is designed to be left on a small cart. This device can potentially be brought to the bedside, and used during routine endoscopic check-up. Associated with the device, a complete framework has been elaborated in order to simplify the acquisition procedure as well as the signal processing. This results in a fully automated environment taking in charge hardware control, data storage and signal processing, up to the tri-dimensional scene rendering.

EPFL2009

Mid-infrared surface plasmon resonance sensing applied to refractive index measurements of liquids

Sylvain Herminjard

There has been a very strong development of the sensors based on surface plasmon resonance during the last thirty years, mostly for biological and biomedical applications. If the first experiments in this field were carried out at the beginning of the 20t century, it would have been necessary to wait for the end of the sixties to see the first devices performing accurate measurements of the refractive indices of gas and liquid samples. Indeed, the surface plasmon resonance phenomenon allows to measure refractive index variations with a high sensitivity that is hardly obtained with other optical measurement techniques. The basic principle consists of exciting the free electrons of a metallic layer with light, which induces the formation of a surface wave called surface plasmon. This resonant phenomenon depends on the wavelength of the excitation light and the refractive indices of the metallic layer and the material located close to the metallic layer. A variation of the refractive index of the latter induces a variation of the resonance condition, which allows to realize optical sensors designed to measure determined samples. An appropriate calibration allows to set a relationship between the variation of the concentration of the sample and the measured refractive index value. Among the various parameters that describe the performances of the sensor, one of the most important is the sensitivity. It is possible to demonstrate that the excitation wavelength has an impact on the sensitivity of the system : the latter increases if the measured sample has an absorption peak at a wavelength close to the excitation wavelength. The main goal of this thesis is to explore this sensitivity enhancement technique based on the absorption properties of the probed medium. A proof-of-principle is experimentally demonstrated with an optical setup constituted of laser sources working in the visible range of the electromagnetic spectrum. However, many materials have absorption peaks located in the mid-infrared range due to their fundamental molecular vibrations. Therefore, the realization of a plasmonic sensor working in the mid-infrared could allow to measure these materials with an increased sensitivity. To the best of our knowledge, surface plasmon resonance based sensors have never been developed above the near-infrared. This thesis presents for the first time the design and realization of a plasmonic sensor working in the mid-infrared range able to measure refractive index variations of gas and liquids samples. Even if the optical sources, components and detectors designed for the mid-infrared are clearly different from the ones designed for the visible range, it has been possible to successfully realize two systems working in the mid-infrared range during this project. The first is able to perform gas measurements. As the excitation wavelength depends on the measured sample, it was necessary to select a laser source that had a wavelength located close to the absorption peak of the gas under measurement. For this purpose, we designed a plasmonic sensor working at a 4.4 µm wavelength able to measure carbon dioxide (CO2) absorbing at 4.3 µm. It has been demonstrated that the experimental sensitivity of this system is five times higher than the theoretical sensitivity obtained with a system working in the visible range at a 633 nm wavelength. The second has been conceived to measure liquid samples in order to measure variations of concentration of CO2 dissolved in water. If measurements of refractive index variations (without using the sensitivity enhancement technique) could be performed successfully with variations of concentration of alcohol in water, further work is necessary to get decisive results for CO2 dissolved in water. This project was carried out in collaboration with an industrial partner in order to take into account some industrial constraints during the development of the sensor. Therefore, particular care has been taken in order to design a system that is compact, mechanically robust, without any mechanical moving parts, cheap and easily reproducible. The technological development presented in this thesis finds many applications mainly in the chemical, biological and biomedical fields. Indeed, many proteins show absorption peaks in the mid-infrared. It could be possible to measure their concentration or the modification of their properties – like their composition or structure – with an increased sensitivity. The interest of surface plasmons is that the measurement is not a transmission-based technique, but rather a "reflection-based technique", as the light does not go through the gas or liquid sample. This measurement technique is also adapted for high volume samples that are present in industrial production processes like water or soft drink quality control.

EPFL2010

Mid-infrared surface plasmon resonance sensing applied to refractive index measurements of liquids

Sylvain Herminjard

EPFL2010

Endoscopic low coherence interferometry applied to tri-dimensional contouring of upper airways

Yves Delacrétaz

EPFL2009