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Microfluidic Scintillation Detectors for High Energy Physics

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A silicon straight tube fluid density sensor

Mohammad Najmzadeh

In this paper, a new and simple silicon straight tube is tested as a fluid density sensor. The tube structure has a hexagonal cross section. The fabrication process consists of anisotropic silicon etching and silicon fusion bonding. A tube structure with a ...

Institute of Physics2007

Nanostencil lithography for nanowire patterning

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

Stencil lithography is an innovative method for patterning that has a great flexibility from many points of view. It is based on shadow mask evaporation using thin silicon nitride membranes that allow the patterning of sub-100 nm features up to 100 μm in a ...

2006

Design and fabrication of nanofluidic devices by surfaces micromachining

Nico de Rooij

Using surface micromachining technology, we fabricated nanofluidic devices with channels down to 10̂nm deep, 200̂nm wide and up to 8̂cm long. We demonstrated that different materials, such as silicon nitride, polysilicon and silicon dioxide, combined with ...

2006

Novel full platinum nanoprobes suitable for biological SPM experiments

Jürgen Brugger, Johannes Steen

We have developed a hybrid scanning probe microscopy sensor consisting of a SU-8 body and full platinum cantilever and tip. The fabrication process is based on surface-micromachining of a silicon wafer, where oxidation sharpened moulds define the tip shape ...

2006

DRIE based novel technique for AFM probes fabrication

Luis Guillermo Villanueva Torrijo

We report on the fabrication of atomic force microscopy (AFM) probes using a novel technology that performs every machining step by means of one single deep reactive ion etching (DRIE) equipment. Specific etching conditions are optimized in order to define ...

2006

Fabrication and electroosmotic flow measurements in micro- and nanofluidic channels

Nico de Rooij

An easy method for fabricating micro- and nanofluidic channels, entirely made of a thermally grown silicon dioxide is presented. The nanochannels are up to 1-mm long and have widths and heights down to 200 nm, whereas the microfluidic channels are 20-μm wi ...

2006

Transfer of small structures by bonding

Luis Guillermo Villanueva Torrijo

The work presented in this paper deals with the bonding of small structures, down to 1 mu m. Its aim is to evaluate the dimensional limits of anodic bonding between silicon and pyrex 7740 glass. Test structures consisting in silicon pillars with controlled ...

2006

Transfer of small structures by bonding

Luis Guillermo Villanueva Torrijo

2006

Design, Simulation, Fabrication, and Characterization of a Digital Variable Optical Attenuator

Nico de Rooij, Wei Sun, Wilfried Noell

In this paper, we present the design, simulation, fabrication, and some measurement and characterization of a novel 16-bit digital variable optical attenuator (VOA) that attenuates by switching individual mirror of an array as an attempt to achieve input v ...

2006

Polymer-based cantilevers with integrated electrodes

Jürgen Brugger, Giovanni Boero, Radivoje Popovic, Schahrazede-Lila Mouaziz

An innovative release method of polymer cantilevers with embedded integrated metal electrodes is presented. The fabrication is based on the lithographic patterning of the electrode layout on a wafer surface, covered by two layers of SU-8 polymer: a 10-um-t ...

Institute of Electrical and Electronics Engineers2006