Tunable resonant cavity enhanced detectors using vertically actuated MEMS mirrors
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This thesis presents the design and microfabrication technology of a tip-tilt, 2 degree of freedom "mirror system" made out of Silicon On Insulator (SOI) wafers with two movable mirrors that have diameter of 10 mm. The system was intended for precise beam ...
The mid-infrared range is of interest in spectroscopic applications, due to the large number of organic compounds that exhibit characteristic absorption bands in this spectral region. Semiconductor technology, however, has been developed mainly for the nea ...
The first mirror test for ITER in JET with carbon walls has been completed. Thirty polycrystalline Mo mirrors including four coated with a 1 mu m rhodium (Rh) film were exposed to plasma in the divertor region and in the main chamber. The mirrors were inst ...
Tunable resonant cavity enhanced detectors (RCED) have been realised for the mid-infrared (IR). The bottom mirror as well as the photodiode inside the cavity are based on narrow gap IV-VI materials and grown by molecular beam epitaxy (MBE) on Silicon subst ...
Infrared spectroscopy provides a means to determine the intrinsic geometrical structures of molecules. Here we present a novel spectroscopic method that uses superfluid helium nanodroplets to record IR spectra of cold molecular ions, in this particular cas ...
We are developing micromirror arrays (MMA) for future generation infrared multiobject spectroscopy (MOS) requiring cryogenic environment. So far we successfully realized small arrays of 5 x 5 single-crystalline silicon micromirrors. The 100 mu m x 200 mu m ...
SPIE-Intl Soc Optical Engineering, PO Box 10, Bellingham, Wa 98227-0010 Usa2008
We report here a new technique for spectroscopic studies of protonated, gas- phase biomolecules and demonstrate its utility by measuring highly-resolved electronic and infrared spectra of peptides of up to 17 amino acids. After UV excitation of an aromatic ...
Selective multi-gas detection is often based on spectroscopic methods in the infrared region. The resulting setup consists of a spectrometer and the probing setup where often the spectrometer makes the sensing device large and heavy and does not allow easy ...
This paper presents continuative results on the design, fabrication and measurements of a vertically moving, electrostatically actuated micromirror, first shown at the IEEE MEMS 2007 [N. Quack, I. Züst, S. Blunier, J. Dual, M. Arnold, F. Felder, M. Rahim, ...
Highly sensitive photodetectors for the mid infrared have been obtained by placing a photodiode inside a Fabry Perot cavity. These resonant cavity enhanced detectors (RCED) are sensitive at the resonances only, which depend on the distance between the two ...