On the bending strength of fused silica flexures fabricated by ultrafast lasers [Invited]
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Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2010
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The use of low-energy femtosecond laser beam combined with chemical etching has been proven to be an efficient method to fabricate three-dimensional structures in fused silica. For high-volume application, this technology – like other serial processes – su ...
