Femtosecond Laser Processing of Active and Passive Devices for bio-MEMS

Yves Bellouard
2013
Article de conférence

Résumé

Femtosecond laser processing of glass has been proven to be an efficient tool for fabricating waveguides and microchannels. Here we show that monolithic integration in bio-Micro- Electro-Mechanical-Systems can be pushed forward by introducing additional functionalities.

Source officielle

https://infoscience.epfl.ch/record/210117?ln=fr

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Femtosecond Laser Processing of Active and Passive Devices for bio-MEMS

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