Piezoelectric micro-system for the active vibratory insulation of vibration sensitive components
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Electrode stability, interdiffusion, phase purity and deviation from stoichiometry at the PZT-electrode interface are key issues in PZT thin film integration. This article highlights the use of transmission electron imaging combined with energy dispersive ...
Abstract—A common problem when using piezoceramic actuators for precise positioning is their hysteresis. Either external sensors such as capacitive or inductive probes, optical sensors or strain gauges are commonly used. The latter are the most favorable s ...
The integration of piezoelectric Pb(Zr,Ti)O-3 thin films on silicon substrates for ultrasonic motor applications is reviewed. With suitable buffer and bottom electrode layers the problems due to high processing temperatures in oxygen ambient can be handled ...
Nanocrystalline electrochromic electrodes offer a promising outlook for the realization of displays characterized by sharp contrast and fast switching. These electrodes are constituted of sintered nanoparticles of a semiconductor, for instance titanium dio ...
Novel, highly sensitive piezoelectric acoustic sensors based on partially unclamped Pb(Zr-x, Ti1-x)O-3 (PZT) coated cantilever and bridge have been fabricated by silicon micromachining. High sensitivity at low frequencies (5-100 Hz) has been achieved by pa ...
A newly designed thin-layer STM (TLSTM) technique is presented based on a microfabricated probe combining an electrolytic STM probe with an annular iridium oxide microelectrode operating as a potential-controlled generator or scavenger of H+. This TLSTM co ...
Fabrication and characterization of ZnO thin film piezoelectric sensors on a polyimide membrane is presented in this paper. As a test device a differential pressure liquid flow sensor has been fabricated. We discuss new material combinations for the fabric ...
Electrochem. insertion of lithium in nanoporous and CVD samples of anatase was studied by chronoamperometry. The currents following cathodic and anodic potential steps were monitored as a function of film thickness, temp., and electrolyte concn. The time d ...
This work dealt with the establishment of a reproducible and industrially exploitable fabrication technology for piezoelectric MEMS based on PZT thin films. {100}-textured piezoelectric 1-4 μm thick films were found to be the most suited materials for MEMS ...
Several bottom electrode systems for ferroelectric thin film deposition onto reactive substrates or reactive metal films have been investigated with respect to chemical barrier properties and contact resistivity. Such electrode systems should not deteriora ...