Publication

Characterization and Fatigue of the Converse Piezoelectric Effect in PZT Films for MEMS Applications

Publications associées (121)

Ferroelectric and piezoelectric properties of Nb doped PZT films

Pb(Zr,Ti)O-3 (PZT) and Pb(Zr,Ti,Nb)O-3 (PNZT) thin films were grown on platinized silicon substrates by r.f. magnetron sputtering followed by a post-annealing treatment. The Niobium, Nb, concentration varied from 1 to 7 at.% by increment of 1 at.%. The eff ...

2001

Processing and properties of screen-printed lead zirconate titanate piezoelectric thick films on electroded silicon

Nava Setter, Dragan Damjanovic

The printing of lead zirconate titanate (PZT, Pb(Zr,Ti)O-3) piezoelectric thick films on silicon substrates is being studied for potential use as microactuators, microsensors, and micro.. transducers. A fundamental challenge in the fabrication of useful PZ ...

2001

Characterization of the effective electrostriction coefficients in ferroelectric thin films

Nava Setter

Electromechanical properties of a number of ferroelectric films including PbZrxTi1-xO3(PZT), 0.9PbMg(1/3)Nb(2/3)O(3)-0.1PbTiO(3)(PMN-PT), and SrBi2Ta2O9(SBT) are investigated using laser interferometry combined with conventional dielectric measurements. Ef ...

2001

Micromachined infrared detectors based on pyroelectric thin films

Paul Muralt

The state of the art of thin-film pyroelectric infrared (IR) detectors is reviewed covering device physics, material performance, micro-fabrication and device examples. Emphasis is given to special issues related to thin films, such as small heat capacitie ...

2001

Excess lead in the perovskite lattice of PZT thin films made by in-situ reactive sputtering

Nava Setter, Paul Muralt, Thomas Maeder, Stéphane Hiboux

The incorporation of up to 40 % lead excess into the perovskite lattice of Pb(Zr,Ti)O-3 (PZT) has been investigated. Three independent chemical composition analysis methods confirmed the correct determination of the lead excess, present as Pb2O3. High reso ...

Taylor & Francis2001

Charge relaxation at the interfaces of low-voltage ferroelectric film capacitors: Fatigue endurance and size effects

Nava Setter, Alexander Tagantsev, Igor Stolichnov, Enrico Colla

A unified approach for analysis of polarization fatigue and size effects on ferroelectric switching in relationship with injection and entrapment of charge at the interfacial layer of the ferroelectric film is developed. The proposed model suggests that an ...

2001

Piezoelectric cantilever microphone for photoacoustic GAS detector

Nava Setter, Paul Muralt, Stéphane Hiboux, Andreas Seifert, Nicolas Ledermann

New micromachined pressure sensors based on PZT coated silicon cantilevers have been fabricated and integrated in a photoacoustic gas detector. PZT Sol-gel thin films texture and composition were optimized with respect to the transverse piezoelectric coeff ...

2001

Ferroelectric thin films for micro-sensors and actuators: a review

Paul Muralt

This paper reviews deposition, integration. and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems. As examples, a piezoelectric ultrasonic micromotor and pyroelectric infrared detector array are ...

2000

Evaluation of niobium effects on the longitudinal piezoelectric coefficients of Pb(Zr, Ti)O-3 thin films

Paul Muralt, Stéphane Hiboux

Pb(Zr, Ti)O-3 (PZT) and Pb(Zr, Ti, Nb)O-3 (PNZT) thin films have been deposited on platinized silicon substrates by sputtering followed by a postannealing treatment. The Nb concentration in the films varied between 1 and 7 at. % with increments of 1 at. %. ...

2000

PZT thin films for microsensors and actuators: Where do we stand?

Paul Muralt

This paper reviews deposition, integration, and device fabrication of PbZrxTi1-xO3 (PZT) films for applications in micro-electromechanical systems. An ultrasonic micromotor is described as an example. A summary of the published data on piezoelectric proper ...

2000

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