Publication
Quantum chemical study of the initial surface reactions of HfO2 atomic layer deposition on the hydroxylated GaAs(001)-4×2 surface
Résumé
Initial surface reaction mechanism for atomic layer deposition of HfO2 on the hydroxylated GaAs(001)-4x2 surface using HfCl4 and H2O as precursors is investigated using hybrid density functional theory. The reaction between HfCl4 and H2O with the hydroxylated GaAs(001)-4x2 surface consists of two half-reactions: (1) HfCl4 with GaAs-OH sites and (2) H2O with Hf-Cl sites. The two half-reactions proceed through the formation of stable chemisorbed states, resulting in high activation barriers of 17.1 and 17.6 kcal/mol for HCl formation, respectively. Additional energies are also needed to desorb the respective physisorbed states HCl from the substrate surfaces.
Source officielle
À propos de ce résultat
Cette page est générée automatiquement et peut contenir des informations qui ne sont pas correctes, complètes, à jour ou pertinentes par rapport à votre recherche. Il en va de même pour toutes les autres pages de ce site. Veillez à vérifier les informations auprès des sources officielles de l'EPFL.
Proximité ontologique
Concepts associés (32)
Réaction chimique
Une réaction chimique est une transformation de la matière au cours de laquelle les espèces chimiques qui constituent la matière sont modifiées. Les espèces qui sont consommées sont appelées réactifs ; les espèces formées au cours de la réaction sont appelées produits. Depuis les travaux de Lavoisier (1777), les scientifiques savent que la réaction chimique se fait sans variation mesurable de la masse : , qui traduit la conservation de la masse. thumb|La réaction aluminothermique est une oxydo-réduction spectaculaire.
Reaction rate
The reaction rate or rate of reaction is the speed at which a chemical reaction takes place, defined as proportional to the increase in the concentration of a product per unit time and to the decrease in the concentration of a reactant per unit time. Reaction rates can vary dramatically. For example, the oxidative rusting of iron under Earth's atmosphere is a slow reaction that can take many years, but the combustion of cellulose in a fire is a reaction that takes place in fractions of a second.
Rate equation
In chemistry, the rate law or rate equation for a chemical reaction is a mathematical equation that links the rate of forward reaction with the concentrations or pressures of the reactants and constant parameters (normally rate coefficients and partial reaction orders). For many reactions, the initial rate is given by a power law such as where [\mathrm{A}] and [\mathrm{B}] express the concentration of the species \mathrm{A} and \mathrm{B}, usually in moles per liter (molarity, M).
Publications associées (37)
In-core dosimetry for the validation of neutron spectra in the CROCUS reactor
Andreas Pautz, Vincent Pierre Lamirand, Pavel Frajtag, Axel Guy Marie Laureau, Yifeng Jiang
The present article describes the preliminary validation study of simulated in-core and reflector n eutron spectra in preparation of oncoming experimental programs in the zero-power reactor CROCUS at EPFL. For this purpose, a set of activation foils were i ...
E D P SCIENCES2020Investigation of the heterogeneously catalysed gas phase CO2 hydrogenation reaction: Development of analysis methods and reaction analysis on pristine metal catalysts
Robin Tobias Andreas Mutschler
The aim of this thesis is to contribute to the development of analysis methods that enable an improved investigation of the CO2 hydrogenation reaction such as quantitative mass spectrometry and infrared thermography. Furthermore, the contribution is in the ...
EPFL2019Photocatalytic Performance of CuxO/TiO2 Deposited by HiPIMS on Polyester under Visible Light LEDs: Oxidants, Ions Effect, and Reactive Oxygen Species Investigation
In the present study, we propose a new photocatalytic interface prepared by high-power impulse magnetron sputtering (HiPIMS), and investigated for the degradation of Reactive Green 12 (RG12) as target contaminant under visible light light-emitting diodes ( ...
2019MOOCs associés (4)
Micro and Nanofabrication (MEMS)
Learn the fundamentals of microfabrication and nanofabrication by using the most effective techniques in a cleanroom environment.
Microstructure Fabrication Technologies I
Learn the fundamentals of microfabrication and nanofabrication by using the most effective techniques in a cleanroom environment.
Micro and Nanofabrication (MEMS)
Learn the fundamentals of microfabrication and nanofabrication by using the most effective techniques in a cleanroom environment.