Height-resolved quantification of microstructure and texture in polycrystalline thin films using TEM orientation mapping
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In this study, we report the morphological and structural properties of amorphous and nanocrystalline Si thin films deposited by inductively coupled plasma-assisted chemical vapor deposition (ICP-CVD) technique at low substrate temperatures using H-2 dilut ...
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The local physical properties of polycrystalline semiconducting films drive their performances in a wide variety of optoelectronic devices but are still not completely elucidated. These properties are investigated and correlated on the same region of polyc ...
Until now, only two intrinsically two-dimensional materials have been isolated: graphene and boron nitride (BN). As a consequence, the knowledge of two-dimensional systems is still limited and other classes of two-dimensional materials are needed to enrich ...
The study of texture in thin films is one of the possibilities to obtain information on the fundamental physical processes which govern the thin film growth. Near the substrate, the crystalline orientation of the coating layer will usually be influenced by ...
Recent experimental investigations show that large-area samples of graphene tend to be polycrystalline. Physical properties of such samples are strongly affected by the presence of intrinsic topological defects of polycrystalline materials-dislocations and ...
Nowadays the orientation maps of polycrystalline material are necessary for a better understanding of, for example, the formation of voids in the interconnects of modern electronic devices. As new generation of devices has dramatically reduced in size, new ...
We present our recent experimental results on the formation of off-axis texture and crystallographic tilting of crystallites that take place in thin film of transition metal nitrides. For this purpose, the microstructural development of TiAlN film was stud ...
Grain boundary engineering (GBE) aims at optimizing the properties of face centred cubic materials with low stacking fault energy by creating a high content of special twin boundaries. Quantifying twinning and its parameters, such as the twin related domai ...
In order to understand the texture formation mechanism in thin films grown under oblique angle deposition (OAD), TiAlN films were deposited at room temperature (RT) under various incident angles. We show that both in-plane and out-of-plane crystallographic ...
