Flexible plasmonics and metamaterials on polymeric and nonplanar substrates are demonstrated using nanostencil lithography. High-resolution fabrication with 10 nm accuracy is achieved at high throughput and low cost in a single fabrication step. Optical tuning is shown with mechanical stretching of the polymer substrate. Patterning of nanostructures on curved surfaces, including optical fibers, is demonstrated.
Romain Christophe Rémy Fleury, Aleksi Antoine Bossart
Mark Pauly, Francis Julian Panetta, Tian Chen, Christopher Brandt, Jean Jouve