This project aims to prove of the feasibility of Silicon Fusion Bonding for fabrication of micro- capillaries for gas cooling down. An optimal recipe for Silicon Fusion Bonding is developed, consisting of four steps: RCA cleaning, surface activation with O2 plasma and rehydration, manual pre-bonding and final annealing. Also a study of the influence of the speed of annealing on the bonding strength is conducted.
Christophe Ballif, Franz-Josef Haug, Quentin Thomas Jeangros, Gizem Nogay, Philipp Friedrich Hermann Löper, Martin Ledinsky
Silvestro Micera, Stanisa Raspopovic, Francesco Maria Petrini