Nico de Rooij, Danick Briand, Jérôme Courbat
The residual stress and buckling patterns of free-standing 8?mol.% yttria-stabilized-zirconia (8YSZ) membranes prepared by pulsed laser deposition and microfabrication techniques on silicon substrates are investigated by wafer curvature, light microscopy, ...
Wiley-Blackwell2012