Graphene Based Mechanical Resonators Fabricated via Direct Dry Transfer

We present here the fabrication of large suspended sheets of graphene for mechanical resonators. The diameter of the circular resonators varies from 1.2 μm to 26.5 μm resulting in diameter-to-thickness aspect ratios as large as 74000. The membranes were fabricated in arrays with yields of up to more than 90%. Assuming low to moderate tensile stress,