Fabrication of suspended micro-resonator integrated with PZE electrodes

The objective of this project is the fabrication of hollow piezoelectric micro electric mechanical systems (PZE-MEMS) arrays with suspended micro-channels integrated with a microfluidic network. The ultimate goal is to demonstrate the feasibility of characterizing viscoelastic fluids and cell mechanical properties using such system. We herein propose an application of SMRs as micro-rheological and biological sensors for real time analysis, using mainly the stiffness effect and not only mass-loading. A platform made of a microfluidic network and SMRs with PZE self-actuation and detection will allow multiplexing.