Micromechanical resonators with sub-micron gaps filled with high-k dielectrics
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The objective of this semester project is the fabrication of suspended piezoelectrically transduced resonators and to test and compare the quality of the piezoelectric layer using different processes and parameters. A functional fabrication process by lift ...
Coupling of space-separated resonators is interesting for quantum and communication technologies. In this work, we show that antiferromagnetic resonance in separated parallel-plane slabs of hematite (alpha-Fe2O3) couple cooperatively to terahertz electroma ...
AMER PHYSICAL SOC2023
This paper presents the use of a shear bulk acoustic mode resonator made of a membrane of X-cut lithium niobate (LiNbO3) for ultra-wide band filter applications. Aluminum interdigitated (IDT) electrodes are deposited on top of the LiNbO3 thin film as well ...
This work reports on the design and fabrication of fundamental shear horizontal (SH0) mode acoustic resonators based on a suspended lithium niobate (LNO) film at 1.04 GHz. Due to the large e16 piezoelectric coefficient of YX36 degrees.-cut LNO, fabricated ...
Thermal motion of a room-temperature mechanical resonator typically dominates the quantum backaction of its position measurement. This is a longstanding barrier for exploring cavity optomechanics at room temperature. In order to enter the quantum regime of ...
This work presents the study of suspended Y-cut Lithium Niobate shear bulk acoustic resonators for wide band filter applications in the frequency range of 3.5-4.5GHz. The resonators consist of a Lithium Niobate film with Aluminum top interdigitated electro ...
Thin-film lithium niobate (LNO) has been identified as a promising material platform for enabling high electromechanical coupling and low-loss piezoelectric resonators for filtering applications. In this work, the design and fabrication of fundamental shea ...
Planar microstrip resonators suitable for material characterization application are presented in this paper. The prototype consists of three resonators fed through four ports in a planar dielectric substrate without any additional resonators. The resonator ...
Microelectromechanical systems (MEMS) is among the most revolutionary technologies of 21st century, with the applications ranging from industrial systems to consumer electronics. Using MEMS in battery-powered wireless devices has long been seen as the evol ...
RF MEMS piezoelectric acoustic resonators are the essential building blocks for RF filters used in RF front-end modules for wireless mobile communication due to their compact size in the MHz-GHz frequency range, high Quality factors and large relative band ...