Growth, Integration, and Functional Characterization of AlScN Thin Films for RF MEMS Devices
Graph Chatbot
Chattez avec Graph Search
Posez n’importe quelle question sur les cours, conférences, exercices, recherches, actualités, etc. de l’EPFL ou essayez les exemples de questions ci-dessous.
AVERTISSEMENT : Le chatbot Graph n'est pas programmé pour fournir des réponses explicites ou catégoriques à vos questions. Il transforme plutôt vos questions en demandes API qui sont distribuées aux différents services informatiques officiellement administrés par l'EPFL. Son but est uniquement de collecter et de recommander des références pertinentes à des contenus que vous pouvez explorer pour vous aider à répondre à vos questions.
The paper argues on examples of selected past works that stochastic and knowledge-based approaches do not contradict each other. Frequency resolution of human hearing is decreasing with increasing frequency. Spectral basis designed for optimal discriminati ...
The continuous downscaling of microelectronic circuits combined with increasing interest in ferroelectric thin films for non-volatile random access memories (FeRAM) is drawing great attention to small ferroelectric thin film structures. There are various c ...
Fabrication and characterization of ZnO thin film piezoelectric sensors on a polyimide membrane is presented in this paper. As a test device a differential pressure liquid flow sensor has been fabricated. We discuss new material combinations for the fabric ...
The rapidly maturing integrated Kerr microcombs show significant potential for microwave photonics. Yet, state-of-the-art microcomb-based radiofrequency filters have required programmable pulse shapers, which inevitably increase the system cost, footprint, ...
New micromachined pressure sensors based on PZT coated silicon cantilevers have been fabricated and integrated in a photoacoustic gas detector. PZT Sol-gel thin films texture and composition were optimized with respect to the transverse piezoelectric coeff ...
Aluminum nitride thin films have been grown by reactive magnetron sputter technique using a pulsed power supply. The highly (002)-textured columnar films deposited on platinized silicon substrates exhibited quasi-single-crystal piezoelectric properties. Th ...
The most significant advance in this field in the past year has been the demonstration that single-crystal langasite, La3Ga5SiO14, can be used, at least at high frequencies, at temperatures up to 1000 degrees C. New evidence suggests that domain-wall contr ...
