Nava Setter, Paul Muralt
Sol-gel deposited Pb(Ti,Zr)O-3 thin films have been used to integrate pyroelectric arrays on silicon. The arrays of 1x12 (element size of 600 x 1100 mm(2)) and 1x50 elements (element size of 140 x 1100 mm(2)) are fabricated by standard photolithography tec ...
1997