Waveguide-Based Platform for Large-FOV Imaging of Optically Active Defects in 2D Materials

Single-molecule localization microscopy (SMLM) is a powerful tool that is routinely used for nanoscale optical imaging of biological samples. Recently, this approach has been applied to study optically active defects in two-dimensional (2D) materials. Such defects can not only alter the mechanical and optoelectronic properties of 2D materials but also bring new functionalities, which make them a promising platform for integrated nanophotonics and quantum sensing. Most SMLM approaches, however, provide a field of view limited to similar to 50 x 50 mu m(2), which is not sufficient for high-throughput characterization of 2D materials. Moreover, the 2D materials themselves pose an additional challenge as their nanometer-scale thickness prevents efficient far-field excitation of optically active defects. To overcome these limitations, we present here a waveguide-based platform for large field-of-view imaging of 2D materials via total internal reflection excitation. We use this platform to perform large-scale characterization of point defects in chemical vapor deposition-grown hexagonal boron nitride on an area of up to 100 x 1000 mu m(2) and demonstrate its potential for correlative imaging and high throughput characterization of defects in 2D materials.