A high-cooperativity, nano-optomechanical system comprised of high stress Si3N4

We report the design fabrication and characterization of a monolithic nano-optomechanical transducer comprised of high stress silicon nitride (Si3N4). Our system features a one dimensional Fabry-Perot photonic crystal cavity (Q approximate to 10(5)) integrated with a high-Q (Q approximate to 10(6)) nanobeam resonator with optomechanical cooperativity of C-0 = 23. (c) 2021TheAuthor(s)