Study of gas ionization in a glow discharge and development of a micro gas ionizer for gas detection and analysis
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A review, with 9 refs., is given on trace element anal. by mass spectrometry (MS) and potentiometric stripping anal. (PSA). The key question of the problem is detn. of the structure of the samples (i.e. distribution functions and concns. of atoms, mols., c ...
The use of many plastic packaging materials such as PVC, PAN, etc. to protect food and beverages is restricted because of toxicity and recycling problems and there is a need for the development of new packaging materials with good gas barrier properties. P ...
The time-resolved fluxes of negative polysilicon hydride ions from a power-modulated rf silane plasma have been measured by quadrupole mass spectrometry and modeled using a simple polymerization scheme. Experiments were performed with plasma parameters sui ...
The invention relates to a device for producing a gas mixture consisting of HMDSO and oxygen, whereby process gas is produced. In order to be able to continuously produce a large volume of process gas using such a device and to be able to withdraw the same ...
Ab initio calcns. have been performed on TinO2n-δ clusters, with n = 1-3 and δ = 0, 1, as well as on some of their ionized species. The geometries of the different clusters were optimized and vibrational analyses were performed at the ground-state equil. g ...
We present a new experiment to monitor ionized atom and mass selected cluster depositions in real time using specular reflected thermal helium scattering. Monomer Ag ions with an incident kinetic energy of E/sub dep/=20 eV and E/sub dep/=95 eV create surfa ...
Good understanding of the different phases of involved plasma-chemistry is essential for the development of non thermal plasma technologies for pollution control. These techniques are often based on the production of radicals from dissociation parent gases ...
Negative ions have been clearly identified in silane rf plasmas used for the deposition of amorphous silicon. Mass spectra were measured for monosilicon up to pentasilicon negative ion radical groups in power-modulated plasmas by means of a mass spectromet ...
In this paper we present the first results obtained with a plasma ion mass spectrometer in the boundary of the TEXTOR tokamak. Measurements were made several days after TEXTOR was boronised. Comparisons are made with results obtained in DITE under similar ...
Partial-depth modulation of the rf power in a capacitive discharge is used to investigate the relative importance of negative ions and neutral radicals for particle formation in low-power low-pressure silane plasmas. For less than 85% modulation depth, ani ...
