Publication
We present design, fabrication and experimental characterization of a multichannel Smart Slit Assembly for next generation spectrometers, based on an array of 40 variable optical attenuators employing MEMS shutters integrated with large core multimode rectangular waveguides. The MEMS actuated shutters are fabricated in a 211 mu m thick device layer of a Silicon-On-Insulator wafer by Deep Reactive Ion Etching. We experimentally demonstrate high shutting efficiency of 99.97% at 532 nm and fast reconfiguration