Atomic force microscope lithography using amorphous silicon as a resist and advances in parallel operation
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The contrast mechanisms of domain imaging experiments assisted by atomic force microscope (AFM) have been investigated by model experiments on nonpiezoelectric (silicon oxide) and piezoelectric [Pb(Zr,Ti)O-3] thin films. The first step was to identify the ...
Conductive atomic force microscopy (C-AFM) was used to study the dielectric breakdown of SiO/sub 2/ layers at a nanometric scale. First, bare oxide regions were stressed and broken down using the tip as the metal electrode of a MOS structure. The results s ...
We report on the first successful operation of a scanning force microscope using microfabricated capacitive force sensors. The sensors, which are made from single crystal silicon on insulator wafers, consist of a cantilever spring with integrated tip at th ...
Silicon and silicon nitride surfaces have been successfully terminated with carboxylic acid monolayers and investigated by atomic force microscopy (AFM) and scanning near-field optical microscopy (SNOM). On clean Si surface, AFM showed topographical variat ...
We present an automation technique for the growth of electron beam deposited tips on whole wafers of atomic force microscope cantilevers. This technique uses pattern recognition on scanning electron microscope images of successive magnifications to precise ...
This thesis deals with the development of microfabrication technologies based on photoplastic structuring by lithographic and molding techniques. These technologies, combined with an original releasing method, allow for the simple fabrication of pseudo thr ...
The objective of this work is to fabricate a scanning probe sensor that combines the well-established method for atomic force microscopy, employing a micro-machined Si cantilever and integrated tip, with a probe for the optical near field. A photosensitive ...
A novel probe based on a commercial quartz tuning fork and a microfabricated cantilever is presented. The U-shaped cantilever with a monolithic tip is combined with the tuning fork in a symmetrical arrangement, such that each of the two legs of the cantile ...
We present an atomic force microscope ~AFM for operation at low temperatures under ultrahigh vacuum conditions. It uses the laser beam deflection method to measure the bending of the cantilever. The four quadrant photodiode allows the detection of vertical ...
In the past, conducting AFM probes have been made by coating standard Si-cantilevers and tips with a thin film of e.g. tungsten (W). Here, we describe a new AFM probe made entirely out of tungsten. The fabrication involves microfabrication techniques such ...