Micromachined Silicon Cantilevers and Tips for Scanning Probe Microscopy
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The quartz tuning fork based probe {e.g., Akiyama et al. [Appl. Surf. Sci. 210, 18 (2003)]}, termed "A-Probe," is a self-sensing and self-actuating (exciting) probe for dynamic mode atomic force microscope (AFM) operation. It is an oscillatory force sensor ...
This thesis comes within the scope of tribology studies at the nanometer scale. The experimental techniques used in this work are essentially related to atomic force microscopy, which gives a direct access to the topography and forces of the studied system ...
Recently electrically conducting SPM probes were used as read/write sensor of magneto-resistive nanopillars and ferroelectric domains in the development of >1 Tb/inch2 data storage. Since metal coated (platinum (Pt) or Pt/iridium) silicon (Si) probes are n ...
We report on the fabrication of atomic force microscopy (AFM) probes using a novel technology that performs every machining step by means of one single deep reactive ion etching (DRIE) equipment. Specific etching conditions are optimized in order to define ...
We report on the fabrication of atomic force microscopy (AFM) probes using a novel technology that performs every machining step by means of one single deep reactive ion etching (DRIE) equipment. Specific etching conditions are optimized in order to define ...
The general idea of Nanotechnology is not new – it has been studied since Nobel laureate Richard Feynman outlined the idea in a speech in 1959 – but it's only recently that the progress carried out in the various fields of material, optic, physic and engin ...
The shape and dimensions of an atomic force microscope tip are crucial factors to obtain high resolution images at the nanoscale. When measuring samples with narrow trenches, inclined sidewalls near 90 or nanoscaled structures, standard silicon atomic forc ...
The coupling of stimuli-responsive macromolecules to nanostructured surfaces opens the perspective for the fabrication and integration of "smart" micro- and nano-electro-mechanical systems (MEMS&NEMS) in which the smallest motile unit is the polymeric chai ...
The era of scanning probe microscopy (SPM) started twenty years ago. A cut gold cantilever with a glued diamond stylus served as the scanning probe. Within a few years the crystalline silicon (Si) became the – up to today – predominant SPM probe material. ...
We have developed hybrid AFM probes with SU-8 polymer body and full platinum and tungsten cantilever and tip. The fabrication process uses surface micromachining of a (100) silicon wafer. The metal (platinum or tungsten) is sputter deposited in oxidation s ...
