Nico de Rooij, Caglar Ataman, Wilfried Noell, Fabio Jutzi, Sébastien Lani, Dara Zaman Bayat
This paper reports a high fill-factor (>90%), 2-dimensional analog micromirror array designed specifically for very high, optically induced thermal load applications. Each pixel can attain a mechanical DC rotation angle of ±4 degrees around any arbitrary a ...
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