Fabrication of a Millinewton Force Sensor Using Low Temperature Co-fired Ceramic (LTCC) Technology

This study is aimed at outlining the fabrication of a novel piezoresistive force sensor using LTCC technology, which operates at millinewton range, yet is compatible with low cost thick-film fabrication process. Mechanical and electrical characterization of the device is explained in terms of processing conditions, including the principle of force sensing and materials employed. The improvement of device functionality by modifying commercially-available thick- film conductors is described. The sensors are found to be efficient in responding to forces below 100 mN.