Emerging Nanopatterning Methods based on MEMS Technology
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Patterning with lithographic processes requires processing steps including the use of resist spinning and chemical solvents for the development of resist. These steps cannot be applied to mechanical fragile and bio/chemically functional surface layers such ...
A new tool of surface patterning technique for general purpose lithography was developed based on shadow mask method. This paper describes the fabrication of a new type of miniaturized shadow mask. The shadow mask is fabricated by photolithography and etch ...
Sub-micron scale lithography methods using deep UV, X-ray or electron beams will allow for further progress in integrated circuit hardware manufacturing. The drawback of these high-end patterning methods however is firstly, the high cost of the equipment, ...
This article presents a new integrated microfluidic/microoptic device designed for basic biochemical analysis. The microfluidic network is Wet-etched in a Borofloat 33 (Pyrex) glass wafer and sealed by means of a second wafer. Unlike other similar microflu ...
A rapid and simple method to fabricate tiny shadow-masks and their use in multi-layer surface patterning with in situ micromechanical alignment is presented. Instead of using silicon micromachining with through-wafer etching to define the thin membrane wit ...
We report the design, fabrication and test of piezoresistive cantilevers for intermolecular force detection in biochemical sensing. The small forces involved in molecular recognition experiments are best detected with cantilevers with small spring constant ...
Polymers have the ability to conform to surface contours down to a few nanometres. We studied the filling of transparent epoxy-type EPON SU-8 into nanoscale apertures made in a thin metal film as a new method for polymer/metal near-field optical structures ...
We report the design, fabrication and test of piezoresistive cantilevers for intermolecular force detection in biochemical sensing. The small forces involved in molecular recognition experiments are best detected with cantilevers with small spring constant ...