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Processing and properties of thin film pyroelectric devices

Publications associées (32)

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Mode hybridization in photonic crystal molecules

Laurent Balet, Massimo Gurioli

A complete control of the coupling between the modes of two photonic crystal microcavities is obtained by using a combination of several local tuning techniques. By a local and controlled modification of one cavity we are able to bring into resonance modes ...

2010

Estimation d'erreur d'une méthode de volumes-éléments finis stabilisée appliquée au problème de Stokes stationnaire et transient

Sabine Luisier

The present report addresses the rigorous study of convergence of a stabilized finite volume element method applied to stationary and time dependent Stokes problems. Some preliminary results about the existence and uniqueness of solution at continuous and ...

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Thermo-hydro-mechanical simulation of ATLAS in-situ large scale test in Boom Clay

Lyesse Laloui, Bertrand François

Following the need for understanding and quantifying the effect of temperature on the response of a candidate host formation for radioactive waste disposal, finite element modelling of an in-situ thermal experiment has been carried out. Based on a thermo-h ...

2009

The integration of ferroelectrics in electronic devices requires that they be used in the form of thin films, which implies that for such systems finite-size effects related to the presence of a ferroelectric-electrode interface become important. In this t ...

EPFL2008

Fabrication and properties of high-Q AlN/SiO2 composite TFBAR's for above IC oscillators

Paul Muralt, Alvaro Artieda

High-Q, bulk acoustic wave composite resonators based on a symmetric layer sequence Of SiO2-A1N-SiO2 sandwiched between electrodes have been developed. Acoustic isolation was achieved by means of deep silicon etching to obtain membrane type TFBAR's. Three ...

Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa2007

We investigated he effect of film orientation on piezoelectric and ferroelectric properties of (Bi(3.25)Ln(0.75))Ti3O12 (Ln=La, Nd, and Sm). c-axis-oriented films were grown on (111)Pt electrodes with nondoped Bi4Ti3O12 buffer layers. The films grown on (1 ...

2005

Enhanced performance of pyroelectric microsensors through the introduction of nanoporosity

Nava Setter

Sol-gel process has successfully been applied for the deposition of porous PbZrxTi1-xO3 (x = 0.45, 0.15) thin films on platinized silicon wafers. Addition of a polymer as a volatile phase to the precursor sol prior to spin coating has been proved an excell ...

2004

The continuous downscaling of microelectronic circuits combined with increasing interest in ferroelectric thin films for non-volatile random access memories (FeRAM) is drawing great attention to small ferroelectric thin film structures. There are various c ...

EPFL2004

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Thin films of neodymium-modified bismuth titanate Bi3.44Nd0.56Ti3O12 (BNT) were grown on Pt/TiO2/SiO2/Si substrates using chemical solution deposition method. The capacitors made by applying top Au electrodes on BNT films showed significantly improved valu ...

2002

Micromachined infrared detectors based on pyroelectric thin films

Paul Muralt

The state of the art of thin-film pyroelectric infrared (IR) detectors is reviewed covering device physics, material performance, micro-fabrication and device examples. Emphasis is given to special issues related to thin films, such as small heat capacitie ...

2001