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PZT thin films for micro sensors and actuators

Publications associées (42)

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Design optimization of vibration energy harvesters fabricated by lamination of thinned bulk-PZT on polymeric substrates

Nico de Rooij, Danick Briand, Andres Felipe Vasquez Quintero, Pattanaphong Janphuang, Robert Andrew Lockhart, Nadine Besse

The design optimization through modeling of a thinned bulk-PZT-based vibration energy harvester on a flexible polymeric substrate is presented. We also propose a simple foil-level fabrication process for their realization, by thinning the PZT down to 50 mu ...

Iop Publishing Ltd2014

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Barium titanate is a promising candidate for integrated photonic application due to its high electro-optic coefficient; therefore the need arises for a suitable deposition technique which provides high film quality at low temperatures (below 500 degrees C) ...

Elsevier Science Sa2013

High-mobility organic thin-film transistors based on a small-molecule semiconductor deposited in vacuum and by solution shearing

Klaus Kern, Hagen Klauk

The small-molecule organic semiconductor 2,9-di-decyl-dinaphtho-[2,3-b: 2',3'-f]-thieno[3,2-b]-thiophene (C-10-DNTT) was used to fabricate bottom-gate, top-contact thin-film transistors (TFTs) in which the semiconductor layer was prepared either by vacuum ...

Elsevier Science Bv2013

Wafer Level Fabrication of Vibrational Energy Harvesters using Bulk PZT Sheets

Nico de Rooij, Danick Briand, Pattanaphong Janphuang, Robert Andrew Lockhart

This paper presents a complete wafer level microfabrication process for the production of unimorph MEMS energy harvesters based on bulk PZT. Recently, piezoelectric harvesters designed to take advantage of the high quality piezoelectric properties of bulk ...

Elsevier Science Bv2012

Epitaxial Piezoelectric MEMS on Silicon

Don Isarakorn

Integration of new functional materials into silicon microsystems is a key factor to enable technology for a wide range of innovative MEMS devices. Piezoelectric materials are of primary interest for integrating sensing and actuation functions in MEMS due ...

EPFL2011

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Silicon heterojunction solar cells have high open-circuit voltages thanks to excellent passivation of the wafer surfaces by thin intrinsic amorphous silicon (a-Si:H) layers deposited by plasma-enhanced chemical vapor deposition. We show a dramatic improvem ...

2011

Dielectric and acoustical high frequency characterisation of PZT thin films

Paul Muralt, Janine Conde

Pb(Zr, Ti)O-3 (PZT) is an interesting material for bulk acoustic wave resonator applications due to its high electromechanical coupling constant, which would enable fabrication of large bandwidth frequency filters. The major challenge of the PZT solid solu ...

Iop Publishing Ltd, Dirac House, Temple Back, Bristol Bs1 6Be, England2010

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This paper reports on the microfabrication and characterization of piezoelectric MEMS structures based on epitaxial Pb(Zr0.2Ti0.8)O-3 (PZT) thin films grown on silicon wafers. Membranes and cantilevers are realized using a sequence of microfabrication proc ...

Institute of Physics2010

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In silicon heterojunction solar cells, the passivation of the crystalline silicon wafer surfaces and fabrication of emitter and back surface field are all performed by intrinsic and doped amorphous silicon thin layers, usually deposited by plasma-enhanced ...

2010

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Conductive zinc oxide (ZnO) grown by low pressure chemical vapor deposition (LPCVD) technique possesses a rough surface that induces an efficient light scattering in thin film silicon (TF Si) solar cells, which makes this TCO an ideal candidate for contact ...

2010