La1-xSrxCoO3 as electrode materials for ferroelectric thin film applications
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Strontium barium niobate (SrxBa1-xNb2O6, shortly SBN) is a solid solution system with tetragonal tungsten bronze crystal structure. It exhibits a ferroelectric phase with only one polar axis and a transition temperature depending on the Sr/Ba ratio. This t ...
This work dealt with the establishment of a reproducible and industrially exploitable fabrication technology for piezoelectric MEMS based on PZT thin films. {100}-textured piezoelectric 1-4 μm thick films were found to be the most suited materials for MEMS ...
Polycrystalline aluminum nitride thin films were deposited onto platinum, aluminum, and titanium electrodes by reactive magnetron sputtering in the pulsed direct current mode. The films exhibited all a columnar microstructure and a c-axis texture. The buil ...
The results of structural and electrical characterizations of SrTiO3 thin films deposited onto MgO and LaAlO3 substrates by pulsed laser deposition technique are presented. The influence of substrate and annealing procedure on the crystalline structure and ...
Deposition of thin films via hydrothermal method has various advantages: low deposition temperature, high purity, deposition on a three-dimensional structure, and a large thickness. Although an epitaxial lead zirconate titanate (PZT) thin-film deposition h ...
A substrate with transparent electrodes is formed from a transparent material on which is deposited a film of a transparent conducting material with a thickness e 1and a refractive index n 1. A substrate with transparent electrodes is formed from a transpa ...
The continuous downscaling of microelectronic circuits combined with increasing interest in ferroelectric thin films for non-volatile random access memories (FeRAM) is drawing great attention to small ferroelectric thin film structures. There are various c ...
We report a novel mode of quasi-static oscillatory crack propagation when a cutting tip of moderately large width is driven through a thin brittle polymer film. Experiments show that the amplitude and wavelength of the oscillatory crack paths scale linearl ...
Fabrication of high-density ferroelectric memories requires the growth of the ferroelectric material on the drain contact metal. In standard 0.5 mum technology, tungsten plugs are applied to connect the drain contacts to the first metallization level. In t ...
This paper addresses the problem of time-dependent dielectric breakdown of Pb(Zr,Ti)O-3 (PZT) thin films. It is shown by using constant-current breakdown measurements, that for PZT film capacitors with Pt and SrRuO3 (SRO) electrodes the breakdown onset is ...