Publication
Piezoelectric coatings of PbZrxTi1-xO3 (PZT) were deposited on standard telecommunication fibers. The PZT coatings were produced by reactive de magnetron sputtering of metal targets in pure oxygen atmosphere. The deposition was carried out at substrate temperatures between 500 and 600 degrees C. Film thicknesses are in the range of 1300 to 1500 nm. The device structure under investigation is of the Ti/Pt/PZT/Au type. X-ray diffraction (XRD) scanning electron microscopy (SEM), and electrical measurements were used to characterize the films. Results on crystalline phase formation, microstructure, and ferroelectric behavior of the axially symmetric coatings are presented.
Duncan Thomas Lindsay Alexander, Chih-Ying Hsu, Bernat Mundet, Jean-Marc Triscone