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Gas spectrometry based on a pyroelectric thin film array

Publications associées (47)

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Fourier transform ion cyclotron resonance mass spectrometry (FT-ICR MS) has been used to probe the interaction of the anticancer drug cisplatin with oligonucleotides. The binding kinetics, the nature of the adducts formed, and the location of the binding s ...

2008

The absorption spectra of small silver and gold clusters are presented. The experimental technique consists in depositing clusters in an argon matrix which is illuminated with white light. By collecting the outcoming light from the matrix and by analysing ...

EPFL2005

Spatial representativeness is an important quality criterion in trace gas monitoring, especially if measurements are intended for regulatory and model validation purposes. Open-path absorption spectroscopy techniques meet the representativeness requirement ...

EPFL2004

Etude de l'origine et de la croissance de particules submicrométriques dans les plasmas radiofréquence réactifs

Christian Deschenaux

The formation of sub-micron sized particulates has been studied in a low pressure (0.1 mbar) radio-frequency (13.56 MHz) capacitively coupled plasma discharge. Particles are studied in situ by infrared absorption spectroscopy, laser illumination and Cavity ...

EPFL2002

Tunable optical filter of porous silicon as key component for a MEMS spectrometer

Philippe Renaud, Sandra Schweizer, Gerhard Lammel

We present a microspectrometer based on a tunable interference filter for infrared or visible light that scans the desired part of the spectrum within milliseconds. A single pixel detector measures serially the intensity at selected wavelengths. This conce ...

2002

MEMS infrared gas spectrometer based on a porous silicon tunable filter

Philippe Renaud, Sandra Schweizer, Gerhard Lammel

We present a MEMS infrared spectrometer for selective and quantitative chemical gas analysis. infrared absorption spectroscopy can distinguish gases easily and also detect nonreactive molecules like CO2, in contrast to e.g. metal oxide gas sensors The foll ...

2001

Micromachined infrared detectors based on pyroelectric thin films

Paul Muralt

The state of the art of thin-film pyroelectric infrared (IR) detectors is reviewed covering device physics, material performance, micro-fabrication and device examples. Emphasis is given to special issues related to thin films, such as small heat capacitie ...

2001

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We present a tunable interference filter for infrared and visible light that scans the desired part of the optical spectrum within milliseconds. A single pixel detector measures serially the intensity at selected wavelengths. This concept avoids expensive ...

2001

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New micromachined pressure sensors based on PZT coated silicon cantilevers have been fabricated and integrated in a photoacoustic gas detector. PZT Sol-gel thin films texture and composition were optimized with respect to the transverse piezoelectric coeff ...

2001

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2000