Diffusion-barrier coating for protection of moisture and oxygen sensitive devices

Barrier film for encapsulation of oxygen and moisture sensitive devices comprising a base polymer substrate and applied onto the base substrate, a barrier layer comprising an inorganic coating deposited by a vapour deposition method, characterised in that the deposited barrier coating is further coated with a healing layer consisting of a crosslinked organopolysiloxane, which is covalently bound to the inorganic coating.