The present invention relates to a device to carry out semiconductor based molecular diagnostics comprising a microfluidic chip carrier 1, an elastomer microfluidic module 2 and a CMOS chip 3, one surface of said microfluidic module facing and contacting one surface of said CMOS chip housing one or more field-effect transistor-based (FET-based) biosensors 3.1, the surface of said microfluidic module comprising one or more microfluidic flow channels 2.2.4, one or more analytical chambers 2.2.3 facing said one or more FET-based biosensors, one or more metal electrode lines 2.2.2 forming an electrode network patterned onto said surface of said microfluidic module, wherein a portion of the one or more electrode lines is non-planar, has a rounded or semi-circular shape and conformally coats the inside of the one or more microfluidic flow channels.