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Lecture
Polymer Materials for MEMS
Description
This lecture covers various polymer materials used in Micro-Electro-Mechanical Systems (MEMS), including thermoplastic polymers like polycarbonate and PMMA, elastomeric polymers such as PDMS, and specialized polymers like PTFE and Parylene. It discusses their properties, applications, and fabrication processes, highlighting their unique characteristics and advantages in MEMS technology.
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