Scanning Electron Microscopy: Basics

This lecture introduces the basics of Scanning Electron Microscopy (SEM), starting with its principle demonstrated in 1938. SEM is dedicated to massive samples, providing surface and topographical analyses. It involves electron-sample interactions, detectors, sample preparation, and image formation. The lecture covers topics such as electron sources, objective lens, working distance, scanning coils, detectors, sample relaxation, and contrasts in SEM images. It also discusses resolution, magnification, depth of field, and various contrasts observed in SEM, including topographic, chemical, and crystalline contrasts. Additionally, it explores other contrasts like surface crystalline, magnetic, and electrical potential contrasts, as well as different imaging techniques like absorbed electron imaging, transmitted electron imaging, cathodoluminescence imaging, and XRMA and AES imaging.