Chemical Vapour Deposition: Micro and Nanofabrication

Description

This lecture covers the principles and applications of Chemical Vapour Deposition (CVD) in micro and nanofabrication processes. It explains the CVD equipment, process, and key aspects such as thermodynamics, thin film growth kinetics, and gas flow conditions. The lecture also discusses a method for wafer-scale encapsulation of MEMS devices and provides examples of CVD reactions and equipment.

Official source

https://mediaspace.epfl.ch/media/0_2cjrch4x

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