Lecture
This lecture covers topics related to thermal effects in micro and nanosystems, including gas conduction, thermal conductance, radiative heat transfer, temperature fluctuations, heat losses in micromachined bolometers, and thermal accelerometers. It discusses the competition between conduction and convection losses, the impact of small gaps on thermal conductivity, and the influence of radiation on heat transfer coefficients. The ultimate resolution limitation in MEMS bolometers due to radiation conduction is also explored, along with strategies to modulate thermal parameters for improved sensitivity and bandwidth control.