Lecture

Gas Flows and Damping in MEMS

In course

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Description

This lecture covers the Knudsen number and its implications on gas flows, from continuum to molecular regimes, as well as the quality factor variations in different pressure regimes due to gas damping. It also discusses squeeze film damping, lateral damping, and the concept of Knudsen pump with multiple stages.

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_47w0vgnp

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